Thin-film Materials
Metal Target
HEXON offers various pure metal sputtering targets which purity arrays from 99% (2N) to 99.9999% (6N). We manufacture sputtering targets by using latest techniques including vacuum arc melting, vacuum induction melting, electron beam melting, powder sintering and casting. In the meantime, cold / hot isostatic pressing, rolling and extruding are also employed in targets production, in order to realize the full density, homogenous structure, uniform grain size and other customized requirements.
Our metal sputtering targets are available in either planar or rotatable form, single piece or multi-piece configuration. Each target is well inspected before delivery, including surface condition, planarity, straightness, concentricity (for rotatable target), size tolerance, chemical composition, grainsize (if required) and ultrasonic tested for both targets and bonding areas. Targets can be marked with customer’s indications and HEXON provides a traceable material certificate and MSDS (if required) for each order and shipment.
Contact us today with your individual drawing and other requirements such as purity, grainsize, surface roughness, density and we will quote you our most competitive pricing and delivery time within 24 hours.
Refractory metal targets
A-Z
Symbol
Purity (%)
Form
Density (g/cm3)
Chromium
Cr
99.5-99.95
Planar, Rotatable
7.19
Hafnium
Hf
99.9-99.95
Planar, Rotatable
13.10
Molybdenum
Mo
99.95-99.99
Planar, Rotatable
10.22
Niobium
Nb
99.9-99.99
Planar, Rotatable
8.52
Tantalum
Ta
99.9-99.99
Planar, Rotatable
16.60
Titanium
Ti
99.6-99.995
Planar, Rotatable
4.50
Tungsten
W
99.95-99.99
Planar, Rotatable
19.30
Vanadium
V
99.5-99.9
Planar, Rotatable
6.10
Zirconium
Zr
99.2-99.99
Planar, Rotatable
6.56
Base metal targets
A-Z
Symbol
Purity (%)
Form
Density (g/cm3)
Aluminum
Al
99.5-99.9999
Planar, Rotatable
2.70
Copper
Cu
99.9-99.999
Planar, Rotatable
8.93
Iron
Fe
99.9-99.99
Planar
7.87
Magnesium
Mg
99.9-99.999
Planar
1.74
Manganese
Mn
99-99.9
Planar
7.44
Nickel
Ni
99.6-99.995
Planar, Rotatable
8.90
Stainless steel
SS
304, 316
Planar, Rotatable
7.93
Tin
Sn
99.9-99.99
Planar, Rotatable
7.31
Zinc
Zn
99.9-99.99
Planar, Rotatable
7.14
Rare metal targets
A-Z
Symbol
Purity (%)
Form
Density (g/cm3)
Beryllium
Be
99.9-99.99
Planar
1.85
Cobalt
Co
99.5-99.99
Planar
8.85
Indium
In
99.9-99.999
Planar, Rotatable
7.31
Rhenium
Re
99.9-99.99
Planar
21.00
Rare-earth metal targets
|
A-Z |
Symbol |
Purity (%) |
Form |
Density (g/cm3) |
|
Cerium |
Ce |
99.5-99.95 |
Planar |
6.77 |
|
Dysprosium |
Dy |
99.9-99.99 |
Planar |
8.55 |
|
Erbium |
Er |
99.9-99.99 |
Planar |
9.15 |
|
Europium |
Eu |
99.9-99.99 |
Planar |
5.25 |
|
Gadolinium |
Gd |
99.9-99.99 |
Planar |
7.86 |
|
Holmium |
Ho |
99.9-99.99 |
Planar |
6.79 |
|
Lanthanum |
La |
99.5-99.99 |
Planar |
6.17 |
|
Lutetium |
Lu |
99.9-99.99 |
Planar |
9.85 |
|
Neodymium |
Nd |
99.9-99.99 |
Planar |
7.00 |
|
Praseodymium |
Pr |
99.5-99.99 |
Planar |
6.77 |
|
Samarium |
Sm |
99.9-99.99 |
Planar |
7.49 |
|
Scandium |
Sc |
99.9-99.99 |
Planar |
2.99 |
|
Terbium |
Tb |
99.9-99.99 |
Planar |
8.25 |
|
Thulium |
Tm |
99.9-99.99 |
Planar |
9.31 |
|
Ytterbium |
Yb |
99.9-99.99 |
Planar |
6.96 |
|
Yttrium |
Y |
99.9-99.99 |
Planar |
4.47 |
Semi-metal targets
A-Z
Symbol
Purity (%)
Form
Density (g/cm3)
Antimony
Sb
99.9-99.99
Planar
6.79
Boron
B
99-99.99
Planar
6.77
Germanium
Ge
99.999-99.9999
Planar
5.32
Selenium
Se
99.9-99.99
Planar
5.25
Silicon
Si
99.9-99.999
Planar, Rotatable
2.33
Tellurium
Te
99.9-99.99
Planar
7.86
Our advantages
High purity (up to 6N)
Finer grain size
High & Full density (by CIP/HIP)
Homogenous microstructure
Precise tolerance and fine surface roughness
Planar targets
Cold / hot rolled
Circular type, rectangle type, square type
Single piece configuration
Multiple-segmented, butt or beveled joint
Design including counter bores, tapped holes, locating holes, steps, and grooves
Rotatable targets
High density and homogeneous structure
Outer surface lathing, inner surface honing
Monolithic configuration, length up to 4000 mm
Threads, dog-bone designs
Capabilities of tests
Chemical
analysis
Metallurgical structure
Grain size
Surface roughness
Density
Ultrasonic for targets & bonding
Other essential test customers require
