Alloy Target
HEXON manufactures and supplies alloyed sputtering targets such as Al-Ti, Ti-Nb, Ni-Cr, Ni-V, Nb-Zr, Mo-Nb, and many other diverse alloys or custom-tailored alloys, by means of vacuum melting, EB melting, levitation melting, powder metallurgy or any other innovated melting technology that apply to alloy elements customer requires.
Our alloyed targets are available in either planar or rotatable form, single piece or multi-piece configuration. Each target is well inspected before delivery, including surface condition, planarity, straightness, concentricity (for rotatable target), size tolerance, chemical composition, grainsize (if required) and ultrasonic tested for both targets and bonding areas. Targets can be marked with customer’s indications and HEXON provides a traceable material certificate and MSDS (if required) for each order and shipment.
Metal alloy targets
Based element
Symbol
Titanium-based
Ti + Al
Ti + Al +Cr
Ti + Cr
Ti + Nb
Ti + Si
Ti + Zr
Ti + Ni
Ti + V
Nickel-based
Ni + Cr
Ni + Fe
Ni + V
Ni + Zr
Aluminum-based
Al + Cr
Al + Si
Al + Ti
Al + Ti + Si
Al + Cu
Al + Si + Cu
Al + Nd
Molybdenum-based
Mo + Nb
Mo + Ta
Niobium-based
Nb + Zr
Nb + O
Tungsten-based
W + Ti
W + Re
Tantalum-based
Ta + W
Zirconium-based
Zr + Y
Cobalt-based
Co + Fe
Co + Cr
Co + Ta + Zr
Co + Cr + B
Copper-based
Cu + Al
Cu + In
Cu + Ga
Cu + In + Ga
Cu + Ni
Cu + Sn
Cu + Zn
Other metal alloy targets
Zn + Sn
In + Sn
Zn + Al
Al2O3 + ZnO
● Contact us to getting the detailed composition ratios
● Contact us if you do not find requested alloy in above lists
Our advantages
High purity (up to 6N)
Finer grain size (<100μm, <50μm or upon request)
High & Full density (CIP/HIP)
Homogenous microstructure
Precise tolerance and fine surface roughness
Planar targets
Cold / hot rolled
Circular type, rectangle type, square type
Single piece construction
Multiple-segmented, butt or beveled joint
Design including counter bores, tapped holes, locating holes, steps, and grooves
Rotatable targets
High density and homogeneous structure
Outer surface lathing, inner surface honing
Monolithic construction, length up to 4000 mm
Threads, dog-bone designs
Capabilities of tests
Chemical
analysis
Metallurgical structure
Grain size
Surface roughness
Density
Electric resistivity
Coefficient of linear expansion
Ultrasonic for targets & bonding
Other essential test customers require